Research
The main object
- amorphous silicon alloys (thin films)
- nanocrystalline Si deposition, characterization, modification
- transparent conductive oxides
- solar cells
The main motiv
- Establishing the correlation between thin films properties and growing conditions
- Deposition- by using magnetron sputtering, PECVD (Plasma Enhanced Chemical Vapour Deposition)
- Thin film characterisation:
- optical properties
- structural properties (IR spectroscopy, Raman, Micoscopy)
- composition and chemical ordering (vibrational spectroscopy, nuclear methods)
- Thin film modification:
- thermal annealing
- laser annealing
- crystallization
- Amorphous and nano-crystalline silicon alloys
- Amorphous and nano-crystalline hydrogenated silicon (a-Si:H)
- Amorphousand nano-crystalline hydrogenated silicon carbide (a-Si1-xCx:H)
Application
- opto-electronic devices
- photovoltaic solar cells
